(超)高纯洁净压力表-带簧片开关
型号
UPG50-RS/HPG50-RS
产品特点
● 304 Stainless steel case
● Electropolished 316L VAR SS/316L SS wetted parts
● Male/Female swivel process connections (compatible with VCR)
● Helium leak tested to 1X10-9Pa m/s
● Suitable for class 100/ISO Class 5 environments
关键优势
● Electrical contact with up to 2 SPD'T Reed Switches
● Field configurable
● 100% Helium leak tested
● Double-bagged packaging
● Nitrogen purged
典型用途
● (Ultra) High purity gas delivery systems
● Gas sticks
● Process gas analyzers
● Semiconductor
● Cylinder Cabinet
● Exhaust gas for CVD and etching equipment
说明
| 公称直径 | 50 mm |
| 精度等级 | Gauge: + 2/1/2% ofspan (ASME B40.100 Grade A) Switch: 5% ofspan at Switch Point |
| 压力范围 | -1 .. 2; 4 bar /-30 inHg ... 30; 60 psi -1 .. 7; 10; 11; 14; 20 bar -30 inHg ... 100;150;160;200; 300 psi 0 ... 1;2; 4 bar /0 ... 15; 30; 60 psi 0...7;11;14;20; 40; 70;200;270 bar 0.. 100;160;200;300;600;1000;3000; 4000 psi |
| 气路表面粗糙度 | Ra< 10 pin (0.25um Internal)-EP(VCR) Ra< 16 pin (0.4um Internal)-BA(VCR) Ra< 32 pin (0.8um Internal)-BA(NPT) |
| 洁净度等级 | IEST-STD-CC1246 Level 100 R1 (Exceeds ASME B40.100 Level 1V) |
| 电负荷 | Max. switching voltage:24VDC/VAC Max. load:10 W Max. current:0.5 A |
| 负载能力 | Stable :75% FS Fluctuating pressure :66% FS Short time :100% FS |
| 工作環境 | Ambient Temperature-40°C~65°C Relative humidity |
| 温度影响 | Accuracy at temperature above and below the reference temperature (20°C) will be effected by approximately $0.4% per 10°C of full scale |
标准配置
| 过程连接 | VCR1/4" Male (F) / Fmale(G) Face Seal Swivel: 316LSS -EP/BA VCR tubes and fittings: 316L VAR SS(SEMIF20 UHP)-EP/316LSS-BA 1/4" NPT male :316LSS -BA |
| 过程连接方式 | Lower Mount (L)/Center Back Mount (C) |
| 测量元件 | <10MPa C型波登管 Bourdon tube: AISI 316LVMSS-EP/316LSS-BA >10MPa 螺旋波登管 Spiral bourdon tube: AISI 316LVMSS/ 316L SS-BA |
| MMovement | 304 SS |
| 表盘组件 | Panel: Aluminum, white background, black/red lettering, dual pressure scale (bar/psi) Stud: 304 SS |
| 指针组件 | Needle:Aluminum plate, black paint, Needle cap: Aluminum alloy |
| 底壳 | 304SS (electrolytic polishing) |
| 表蒙 | Polycarbonate(PC) |
| 入口保护 | Ip54perIEC/EN 60529 |
