(Ultra)high purity clean pressure gauge with Reed Switch
(Ultra)high purity clean pressure gauge with Reed Switch
Model
UPG50-RS/HPG50-RS
FEATURES
● 304 Stainless steel case
● Electropolished 316L VAR SS/316L SS wetted parts
● Male/Female swivel process connections (compatible with VCR)
● Helium leak tested to 1X10-9Pa m/s
● Suitable for class 100/ISO Class 5 environments
KEY BENEFITS
● Electrical contact with up to 2 SPD'T Reed Switches
● Field configurable
● 100% Helium leak tested
● Double-bagged packaging
● Nitrogen purged
TYPICAL USES
● (Ultra) High purity gas delivery systems
● Gas sticks
● Process gas analyzers
● Semiconductor
● Cylinder Cabinet
● Exhaust gas for CVD and etching equipment
SPECIFICATIONS
| Nominal Diameter(mm) | 50 mm |
| Accuracy(%) | Gauge: + 2/1/2% ofspan (ASME B40.100 Grade A) Switch: 5% ofspan at Switch Point |
| Pressure Range | -1 .. 2; 4 bar /-30 inHg ... 30; 60 psi -1 .. 7; 10; 11; 14; 20 bar -30 inHg ... 100;150;160;200; 300 psi 0 ... 1;2; 4 bar /0 ... 15; 30; 60 psi 0...7;11;14;20; 40; 70;200;270 bar 0.. 100;160;200;300;600;1000;3000; 4000 psi |
| Gas path sur face finis | Ra< 10 pin (0.25um Internal)-EP(VCR) Ra< 16 pin (0.4um Internal)-BA(VCR) Ra< 32 pin (0.8um Internal)-BA(NPT) |
| Cleanliness | IEST-STD-CC1246 Level 100 R1 (Exceeds ASME B40.100 Level 1V) |
| Electricalload | Max. switching voltage:24VDC/VAC Max. load:10 W Max. current:0.5 A |
| Load Capacity | Stable :75% FS Fluctuating pressure :66% FS Short time :100% FS |
| Working Environment | Ambient Temperature-40°C~65°C Relative humidity |
| Temperature Influence | Accuracy at temperature above and below the reference temperature (20°C) will be effected by approximately $0.4% per 10°C of full scale |
Standard Design
| Process Connection | VCR1/4" Male (F) / Fmale(G) Face Seal Swivel: 316LSS -EP/BA VCR tubes and fittings: 316L VAR SS(SEMIF20 UHP)-EP/316LSS-BA 1/4" NPT male :316LSS -BA |
| Process Conn. Location | Lower Mount (L)/Center Back Mount (C) |
| Measuring Element | <10MPa C型波登管 Bourdon tube: AISI 316LVMSS-EP/316LSS-BA >10MPa 螺旋波登管 Spiral bourdon tube: AISI 316LVMSS/ 316L SS-BA |
| MMovement | 304 SS |
| Dial Assembly | Panel: Aluminum, white background, black/red lettering, dual pressure scale (bar/psi) Stud: 304 SS |
| Pointer Assembly | Needle:Aluminum plate, black paint, Needle cap: Aluminum alloy |
| Case | 304SS (electrolytic polishing) |
| Window | Polycarbonate(PC) |
| Ingress protection | Ip54perIEC/EN 60529 |
