UPG50-VP/AP-G-L/C-CSHERUN

Ultra - High purity pressure gauge(UPG, H- Pressure)
VCR1/4

●All parts are treated with ultrasonic purified water

●Welding is performed in an oxygen-free vacuum chamber protected by high purity argon gas

●The product has passed strict pressure and air tightness testing, up to 1X10-9Pa·m³/s

●Suitable for the high purity gas distribution system used in a semiconductor, electronic,medical,biotechnology and pharmaceutical industry

Technical Data Drawing Order information Related Products

Nominal Diameter (mm)	50
Pressure Range	Item No：66007--- 0-1000~4000psi
Displacement (mm)	1.1~1.4
Accuracy (%)	ASME 40.100-2013 GradeA
Gas path sur face finish	< 10 Ra µin (Internal)
Cleanliness	IEST-STD-CC1246 Level 100 R1 (Exceeds ASME B40. 100 Level IV)
Load Capacity	Stable: 75% FS Fluctuating pressure: 66% FS Short time: 100% FS
Working Environment	Ambient Temperature: -40°C ~65°C Medium max. : +100°C Relative humidity: 50%
Temperature Influence	Accuracy at temperature above and below the reference temperature (20°C) will be effected by approximately ±0.4% per 10°C of full scale

Connection	VCR1/4" Fmale Face Seal Swivel 316L SS VCR tubes and fittings 316L VAR SS (SEMI F20 UHP) (available upon request)
Fitting	Lower Mount (L) Center Back Mount (C)
Measuring Element	Capillary tube : AISI 316L VM SS Movement : 304 SS
Dial	Aluminum
Pointer	Aluminum
Case	304 SS (electrolytic polishing)
Window	Polycarbonate(PC)